The glow of an ionic source operating on oxygen in a vacuum
An ion source is a device for obtaining directed flows (beams) of ions . The ion source is an important part of charged particle accelerators , mass spectrometers , ion microscopes , electromagnetic isotope separators, and many other devices.
The ion flux can be obtained as a result of ion emission from the plasma, when heated ( thermionic emission ), when the emitter is bombarded (in this case called a target) by an ion beam ( ion-ion emission ), electrons ( electron-ion emission ) and photons ( photodesorption ) .
See also
- Ion motor
- Ion implantation
- Ion beam analysis
Notes
Literature
- Gabovich M.D. Beams of ions and atoms for controlled thermonuclear fusion and technological purposes. - M .: Energoatomizdat, 1986. - 248 p.
- Gabovich MD Physics and technology of plasma ion sources. - M .: Atomizdat, 1972. - 304 p.
- Forrester, TA Intense ion beams. - M .: Mir, 1992. - 354 p. - ISBN 5-03-001999-0 .
- Ionic injectors and plasma accelerators / A. Morozov. And. - M .: Energoatomizdat, 1990. - 256 p.
- Popov V.F., Gorin Yu.N. Processes and installations of electron-ion technology. - M .: Higher. shk., 1988. - 255 p. - ISBN 5-06-001480-0 .
- Vinogradov M.I., Maishev Yu.P. Vacuum processes and equipment of ion - and electron beam technology. - M .: Mashinostroenie, 1989. - 56 p. - ISBN 5-217-00726-5 .